The oxide sensor is made up of an inert substrate material and two dielectric layers, one of which is sensitive to humidity. The moisture molecules pass through the pores on the surface and cause a change to a physical property of the layer beneath it.
An aluminum oxide sensor has two metal layers that form the electrodes of a capacitor. The number of water molecules adsorbed will cause a change in the dielectric constant of the sensor. The sensor impedance correlates to the water concentration. A silicon oxide sensor is an optical device that changes its refractive index as water is absorbed into the sensitive layer. When light is reflected through the substrate, a wavelength shift can be detected on the output which can be precisely correlated to the moisture concentration. Fiber optic connector can be used to separate the sensor head and the electronics.
This type of sensor is not extremely expensive and can be installed at pipeline pressure (in-situ). Water molecules do take time to enter and exit the pores, so some wet-up and dry down delays will be observed, especially after a slug. Contaminants and corrosives may damage and clog the pores causing a “drift” in the calibration, but the sensor heads can be refurbished or replaced and will perform better in very clean gas streams. As with the piezoelectric and electrolytic sensors, the sensor is susceptible to interference from glycol and methanol, the calibration will drift as the sensor’s surface becomes inactive due to damage or blockage, so the calibration is reliable only at the beginning of the sensor’s life.